Silicon Wafers
We supply semiconductor grade silicon wafers with diameter from 2” up to 6”.
Also we have possibility to supply polished wafers with square and pseudo square shape in accordance to customer’s specification.
Our basic wafers parameters meet SEMI M1-00 standard.
Specifications
II. Silicon Ingots Specifications
| Growth metod | CZ |
|---|---|
| Type/Dopant | N-type /Phosphorus or Antimony or Arsenic doped P-type /Boron doped |
| Diameter | from 2″ – to 8″ |
| Orientation | (100) or (111) or (110) |
| Resistivity | 0,001 – 140 Ohm*cm |
| Oxygen content | <10 * 1017 at/cm3 (<20ppma) – standard (7-9)*1017 at/cm3 (14-18 ppma) – special |
| Carbon content | <10*1016 at/cm3 (<2ppma) – standard <5*1016 at/cm3 (<1ppma) – special |
| Dislocation density | < 10cm-2 |
III. Customized silicon product
The following Silicon customized product for semiconductor industry are also supplied as per requirement
- • silicon tubes(used as reactor chambers for PECVD/CVD processes in silicon device fabrication), diameter 220mm, length 2200mm;
- • silicon disks
- • silicon targets
- • Products of high purity Monocrystalline and Polycrystalline silicon with various shapes
